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  precision, 5 g, dual-axis, high temperature i mems accelerometer adxl206 rev. 0 information furnished by analog devices is believed to be accurate and reliable. however, no responsibility is assumed by analog devices for its use, nor for any infringements of patents or other rights of third parties that may result from its use. specifications subject to change without notice. no license is granted by implication or otherwise under any patent or patent rights of analog devices. trademarks and registered trademarks are the property of their respective owners. one technology way, p.o. box 9106, norwood, ma 02062-9106, u.s.a. tel: 781.329.4700 www.analog.com fax: 781.461.3113 ?2011 analog devices, inc. all rights reserved. features high performance, dual-axis accelerometer on a single ic ?40c to +175c ambient temperature range long life: guaranteed 1000 hours at t a = 175c 13 mm 8 mm 2 mm side-brazed ceramic dual in-line package 1 m g resolution at 60 hz low power: 700 a at v s = 5 v (typical) high zero g bias repeatability high sensitivity accuracy bandwidth adjustment with a single capacitor single-supply operation rohs-compliant compatible with sn/pb and pb-free solder processes applications geological exploration tilt and vibration measurement extreme high temperature industrial products general description the adxl206 is a precision, low power, complete dual-axis i mems? accelerometer for use in high temperature environ- ments. the accelerometer integrates the sensor with signal conditioned voltage outputs on a single, monolithic ic. the adxl206 measures acceleration with a full-scale range of 5 g . the adxl206 can measure both dynamic acceleration (for example, vibration) and static acceleration (for example, gravity). the typical noise floor is 110 g /hz, allowing signals below 1 m g (0.06 of inclination) to be resolved in tilt sensing appli- cations using narrow bandwidths (<60 hz). the user selects the bandwidth of the accelerometer using capacitors c x and c y at the x out and y out pins, respectively. bandwidths of 0.5 hz to 2.5 khz can be selected to suit the application. the adxl206 is available in a 13 mm 8 mm 2 mm, 8-lead, side-brazed ceramic dual in-line package (sbdip). functional block diagram adxl206 sensor +5 v output amp output amp com st y out v s c dc c y r filt 32k ? demod x out c x r filt 32k? ac amp 09600-001 figure 1.
adxl206 rev. 0 | page 2 of 12 table of contents features .............................................................................................. 1 ? applications ....................................................................................... 1 ? general description ......................................................................... 1 ? functional block diagram .............................................................. 1 ? revision history ............................................................................... 2 ? specifications ..................................................................................... 3 ? absolute maximum ratings ............................................................ 4 ? thermal resistance ...................................................................... 4 ? esd caution .................................................................................. 4 ? pin configuration and function descriptions ............................. 5 ? typical performance characteristics ............................................. 6 ? theory of operation .........................................................................9 ? performance ...................................................................................9 ? applications information .............................................................. 10 ? power supply decoupling ......................................................... 10 ? setting the bandwidth using c x and c y ................................. 10 ? self-test ....................................................................................... 10 ? design trade-offs for selecting filter characteristics: noise/bandwidth trade-off ........................................................ 10 ? using the adxl206 with operating voltages other than 5 v .......................................................................... 11 ? using the adxl206 as a dual-axis tilt sensor ................... 11 ? outline dimensions ....................................................................... 12 ? ordering guide .......................................................................... 12 ? revision history 4/11revision 0: initial version
adxl206 rev. 0 | page 3 of 12 specifications t a = ?40c to +175c, v s = 5 v, c x = 0.1 f, acceleration = 0 g , unless otherwise noted. 1 table 1. parameter test conditions/comments min typ max unit sensor input each axis measurement range 2 5 g nonlinearity 0.2 % fs package alignment error 1 degrees alignment error x sensor to y sensor 0.1 degrees cross-axis sensitivity 1.5 % sensitivity (ratiometric) 3 sensitivity at x out , y out v s = 5 v 296 312 328 mv/g sensitivity change due to temperature 4 v s = 5 v 0.3 % zero g bias level (ratiometric) 0 g voltage at x out , y out v s = 5 v, t a = 25c 2.5 0.025 v 0 g bias repeatability ?40c t a +175c 10 m g noise performance noise density v s = 5 v, t a = 25c 110 g /hz rms frequency response 5 c x , c y range 6 0.002 10 f r filt tolerance 24 32 40 k sensor resonant frequency 5.5 khz self-test 7 logic input low 1 v logic input high 4 v st input resistance to ground 30 50 k output change at x out , y out st pin logic 0 to logic 1 150 250 350 mv output amplifier no load output swing low 0.05 0.2 v output swing high 4.5 v lifespan usable life expectancy t a = 175c 1000 hours power supply operating voltage range 4.75 5.25 v supply current 0.7 1.5 ma turn-on time 8 20 ms 1 minimum and maximum specifications are guarant eed. typical specifications are not guaranteed. 2 guaranteed by measurement of initial offset and sensitivity. 3 sensitivity is essentially ratiometric to v s . for v s = 4.75 v to 5.25 v, se nsitivity is 186 mv/v/ g to 215 mv/v/ g . 4 defined as the output change from ambi ent temperature to maximum temp erature or from ambient temp erature to minimum temperatur e. 5 actual frequency response controlled by user-supplied external capacitors (c x , c y ). 6 bandwidth = 1/(2 32 k c). for c x , c y = 0.002 f, bandwidth = 2500 hz. for c x , c y = 10 f, bandwidth = 0.5 hz. minimum/maximum values are not tested. 7 self-test response changes cubically with v s . 8 larger values of c x , c y increase turn-on time. turn-o n time is approximately 160 c x or c y + 4 ms, where c x and c y are in microfarads (f).
adxl206 rev. 0 | page 4 of 12 absolute maximum ratings table 2. parameter rating acceleration (any axis) unpowered 500 g powered 500 g v s ?0.3 v to +7.0 v all other pins (com ? 0.3 v) to (v s + 0.3 v) output short-circuit duration (any pin to common) indefinite ambient operating temperature range (t a ) ?55c to +175c storage temperature range ?65c to +200c stresses above those listed under absolute maximum ratings may cause permanent damage to the device. this is a stress rating only; functional operation of the device at these or any other conditions above those indicated in the operational section of this specification is not implied. exposure to absolute maximum rating conditions for extended periods may affect device reliability. thermal resistance ja is specified for the worst-case conditions, that is, for a device soldered in a printed circuit board (pcb) for surface-mount packages. table 3. thermal resistance package type ja jc unit 8-lead sbdip 120 20 c/w esd caution 09600-002 t p t l time 25c to peak t s preheat critical zone t l to t p temperature time ramp-down ramp-up t smin t smax t p t l figure 2. recommended soldering profile table 4. recommended soldering profile limits profile feature sn63/pb37 pb-free average ramp rate (t l to t p ) 3c/sec max 3c/sec max preheat minimum temperature (t smin ) 100c 150c maximum temperature (t smax ) 150c 200c time (t smin to t smax ), t s 60 sec to 120 sec 60 sec to 150 sec ramp-up rate (t smax to t l ) 3c/sec max 3c/sec max time maintained above liquidous (t l ) 60 sec to 150 sec 60 sec to 150 sec liquidous temperature (t l ) 183c 217c peak temperature (t p ) 240c + 0c/?5c 260c + 0c/?5c time within 5c of actual peak temperature (t p ) 10 sec to 30 sec 20 sec to 40 sec ramp-down rate (t p to t l ) 6c/sec max 6c/sec max time 25c to peak temperatur e 6 minutes max 8 minutes max
adxl206 rev. 0 | page 5 of 12 pin configuration and fu nction descriptions com nc com y out st v s 2 v s x out 1 2 3 4 nc = no connect. do not connect to this pin. 09600-003 adxl206 top view (not to scale) 8 7 6 5 +x figure 3. pin configuration table 5. pin function descriptions pin no. mnemonic description 1, 3 com common. 2 nc no connect. do not connect to this pin. 4 y out y channel output. 5 x out x channel output. 6 v s supply. 7 v s 2 supply. must be connected to v s . 8 st self-test.
adxl206 rev. 0 | page 6 of 12 typical performance characteristics v s = 5 v, unless otherwise noted. 60 50 40 30 20 10 0 2.43 2.44 2.45 2.46 2.47 2.48 2.49 2.50 2.51 2.52 2.53 2.54 2.55 2.56 2.57 voltage (v) percent of population (%) 09600-004 figure 4. x-axis zero g bias at t a = 25c 25 20 15 10 5 0 ?1.2 ?1.0 ?0.8 ?0.6 ?0.4 ?0.2 0 0.2 0.4 0.6 0.8 1.0 1.2 temperature coefficient (m g /c) percent of population (%) 09600-005 figure 5. x-axis zero g bias temperature coefficient 90 80 70 60 50 40 30 20 10 0 0.287 0.297 0.307 0.317 0.327 0.337 0.347 0.357 0.367 0.377 0.387 sensitivity (v/ g ) percent of population (%) 09600-006 figure 6. x-axis sensitivity at t a = 25c 70 60 50 40 30 20 10 0 2.43 2.44 2.45 2.46 2.47 2.48 2.49 2.50 2.51 2.52 2.53 2.54 2.55 2.56 2.57 voltage (v) percent of population (%) 09600-007 figure 7. y-axis zero g bias at t a = 25c 25 20 15 10 5 0 ?1.2 ?1.0 ?0.8 ?0.6 ?0.4 ?0.2 0 0.2 0.4 0.6 0.8 1.0 1.2 temperature coefficient (m g /c) percent of population (%) 09600-008 figure 8. y-axis zero g bias temperature coefficient 80 70 60 50 40 30 20 10 0 0.287 0.297 0.307 0.317 0.327 0.337 0.347 0.357 0.367 0.377 0.387 sensitivity (v/ g ) percent of population (%) 09600-009 figure 9. y-axis sensitivity at t a = 25c
adxl206 rev. 0 | page 7 of 12 cross-axis response (%) percent of population (%) ?5 ?4 ?3 ?2 ?1 0 1 2 3 4 5 0 30 25 20 15 10 5 35 40 09600-010 figure 10. cross-axis response, z-axis vs. x-axis 325 320 315 310 305 300 ?100 ?50 0 50 100 150 200 ambient temperature (c) sensitivity (mv/ g ) 09600-016 figure 11. x-axis sensitivity over temperature, nine devices 100 75 50 25 0 ?25 ?50 ?75 ?100 ?150 ?125 ?175 ?200 ?50 ?25 0 25 50 75 100 125 150 175 200 ambient temperature (c) output bias drift (mv) 09600-015 y-axis x-axis figure 12. zero g output bias drift over temperature, eight devices percent of population (%) 0 30 25 20 15 10 5 35 40 cross-axis response (%) ?5 ?4 ?3 ?2 ?1 0 1 2 3 4 5 09600-011 figure 13. cross-axis response, z-axis vs. y-axis 325 320 315 310 305 300 ?100 ?50 0 50 100 150 200 ambient temperature (c) sensitivity (mv/ g ) 09600-017 figure 14. y-axis sensitivity over temperature, nine devices 09600-014 time (2ms/div) voltage (1v/div) input 5v 0v output figure 15. turn-on time, c x , c y = 0.1 f, time scale = 2 ms/div
adxl206 rev. 0 | page 8 of 12 0 5 10 15 20 25 ?10 output bias drift (mv) percent of population (%) ?40 ?30 ?20 0 10 20 09600-018 figure 16. x-axis zero g output bias drift over 1000 hours at t a = 175c, powered 100 90 80 70 60 50 40 30 20 10 0 200 300 400 500 600 700 800 900 1000 current (a) percent of population (%) 09600-013 v s = 5v figure 17. supply current at t a = 25c ?10 ?20 0 10 09600-019 output bias drift (mv) 0 5 10 15 20 25 percent of population (%) figure 18. y-axis zero g output bias drift over 1000 hours at t a = 175c, powered 0.9 0.8 0.7 0.6 0.5 0.4 0.3 ?50 0 50 100 150 ambient temperature (c) current (ma) 09600-012 v s = 5v figure 19. supply current vs. temperature
adxl206 rev. 0 | page 9 of 12 theory of operation the adxl206 is a complete acceleration measurement system on a single, monolithic ic. the part contains a polysilicon, surface- micromachined sensor and signal conditioning circuitry to imple- ment an open-loop acceleration measurement architecture. the output signals are analog voltages proportional to acceleration. the adxl206 is capable of measuring both positive and negative accelerations to at least 5 g . the accelerometer can measure static acceleration forces such as gravity, allowing it to be used as a tilt sensor. the sensor is a surface-micromachined, polysilicon structure built on top of the silicon wafer. polysilicon springs suspend the structure over the surface of the wafer and provide resistance against acceleration forces. deflection of the structure is measured using a differential capacitor that consists of independent fixed plates and plates attached to the moving mass. the fixed plates are driven by 180 out-of-phase square waves. acceleration deflects the beam and unbalances the differential capacitor, resulting in an output square wave whose amplitude is proportional to accel- eration. phase-sensitive demodulation techniques are then used to rectify the signal and determine the direction of the acceleration. the output of the demodulator is amplified and brought off chip through a 32 k resistor. at this point, the user can set the signal bandwidth of the device by adding a capacitor. this filtering improves measurement resolution and helps prevent aliasing. performance rather than using additional temperature compensation circuitry, innovative design techniques have been used to ensure that high performance is built in. as a result, there is essentially no quantiza- tion error or nonmonotonic behavior, and temperature hysteresis is very low (typically less than 2 m g over the ?40c to +175c temperature range). figure 12 shows the 0 g output performance of eight parts over the ?40c to +175c temperature range. figure 11 and figure 14 show the typical sensitivity shift over temperature for v s = 5 v. sensitivity stability is optimized for v s = 5 v, but it is very good over the full supply voltage range.
adxl206 rev. 0 | page 10 of 12 applications information power supply decoupling for most applications, a single 0.1 f capacitor, c dc , adequately decouples the accelerometer from noise on the power supply. in some cases, however, particularly where noise is present at the 140 khz internal clock frequency (or any harmonic thereof), noise on the supply can cause interference on the adxl206 output. if additional decoupling is needed, a 100 (or smaller) resistor or ferrite bead can be inserted in the supply line of the adxl206. additionally, a larger bulk bypass capacitor (in the 1 f to 22 f range) can be added in parallel to c dc . setting the bandwidth using c x and c y the adxl206 has provisions for band-limiting the x out and y out pins. a capacitor must be added to the pin to implement low-pass filtering for antialiasing and noise reduction. the equation for the 3 db bandwidth is f ?3 db = 1/(2(32 k) c x ) or more simply, f ?3 db = 5 f/ c x the tolerance of the internal resistor (r filt ) can vary typically as much as 25% of its nominal value (32 k); thus, the band- width varies accordingly. a minimum capacitance of 2000 pf for c x and c y is required in all cases. table 6. filter capacitor selection, c x and c y bandwidth (hz) capacitor (f) 1 4.7 10 0.47 50 0.10 100 0.05 200 0.027 500 0.01 self-test the st pin controls the self-test feature. when this pin is set to v s , an electrostatic force is exerted on the beam of the acceler- ometer. the resulting movement of the beam allows the user to test whether the accelerometer is functional. the typical change in output is 800 m g (corresponding to 250 mv). this pin can be left open-circuit or connected to common in normal use. the st pin should never be exposed to voltage greater than v s + 0.3 v. if the system design is such that this condition cannot be guaranteed (that is, multiple supply voltages are present), it is recommended that a clamping diode with low forward voltage be connected between st and v s . design trade-offs for selecting filter characteristics: noise/bandwidth trade-off the accelerometer bandwidth selected ultimately determines the measurement resolution (smallest detectable acceleration). filtering can be used to lower the noise floor, improving the resolution of the accelerometer. resolution is dependent on the analog filter bandwidth at x out . the output of the adxl206 has a typical bandwidth of 2.5 khz. the user must filter the signal at this point to limit aliasing errors. the analog bandwidth must be no more than half the analog-to-digital sampling freque ncy to minimize aliasing. the analog bandwidth can be further decreased to reduce noise and improve resolution. the adxl206 noise has the characteristics of white gaussian noise, which contributes equally at all frequencies and is described in terms of g /hz (that is, the noise is proportional to the square root of the accelerometer bandwidth). the user should limit bandwidth to the lowest frequency needed by the application to maximize the resolution and dynamic range of the accelerometer. with the single-pole roll-off characteristic, the typical noise of the adxl206 is determined by ( ) ( ) 6.1 hz/110 bw g noise rms = at 100 hz, the noise is ( ) ( ) g g noise rms m4.16.1100 hz/110 == often, the peak value of the noise is desired. peak-to-peak noise can only be estimated by statistical methods. table 7 is useful for estimating the probability of exceeding various peak values, given the rms value. table 7. estimation of peak-to-peak noise peak-to-peak value % of time that noise exceeds nominal peak-to-peak value 2 rms 32 4 rms 4.6 6 rms 0.27 8 rms 0.006 peak-to-peak noise values give the best estimate of the uncer- tainty in a single measurement; peak-to-peak noise is estimated by 6 rms. table 8 gives the typical noise output of the adxl206 for various c x and c y values. table 8. typical noise output for various capacitor values bandwidth (hz) c x , c y (f) rms noise (m g ) peak-to-peak noise estimate (m g ) 10 0.47 0.4 2.6 50 0.1 1.0 6 100 0.047 1.4 8.4 500 0.01 3.1 18.7
adxl206 rev. 0 | page 11 of 12 using the adxl206 with operating voltages other than 5 v the adxl206 is tested and specified at v s = 5 v; however, it can be powered with v s as low as 3 v or as high as 6 v. some performance parameters change as the supply voltage is varied. the adxl206 output is ratiometric; therefore, the output sensitivity (or scale factor) varies proportionally to the supply voltage. the zero g bias output is also ratiometric; therefore, the zero g output is nominally equal to v s /2 at all supply voltages. the output noise is not ratiometric but is absolute in volts; therefore, the noise density decreases as the supply voltage increases. self-test response in g is roughly proportional to the square of the supply voltage. however, when ratiometricity of sensitivity is factored in with supply voltage, self-test response in volts is roughly proportional to the cube of the supply voltage. there- fore, at v s = 3 v, the typical self-test response is approximately 50 mv or about 160 m g . using the adxl206 as a dual-axis tilt sensor one of the most popular applications of the adxl206 is tilt measurement. an accelerometer uses the force of gravity as an input vector to determine the orientation of an object in space. an accelerometer is most sensitive to tilt when its sensitive axis is perpendicular to the force of gravity, that is, parallel to the earths surface. at this orientation, the sensitivity of the acceler- ometer to changes in tilt is highest. when the axis of sensitivity is parallel to gravity, that is, near its +1 g or ?1 g reading, the change in output acceleration per degree of tilt is negligible. when the accelerometer is perpendicular to gravity, its output changes nearly 17.5 m g per degree of tilt. at 45, its output changes at only 12.2 m g per degree and resolution declines. dual-axis tilt sensor: converting acceleration to tilt when the accelerometer is oriented so that both its x-axis and y-axis are parallel to the earths surface, it can be used as a 2-axis tilt sensor with a roll axis and a pitch axis. after the output signal from the accelerometer is converted to an acceleration that varies between ?1 g and +1 g , the output tilt in degrees is calculated as follows: pitch = arcsin(a x /1 g) roll = arcsin(a y /1 g) make sure to account for overranges. it is possible for the accelerometer to output a signal greater than 1 g due to vibration, shock, or other accelerations.
adxl206 rev. 0 | page 12 of 12 outline dimensions 07-08-2010-b 0.054 nom 0.032 nom 0.130 nom 85 14 0.320 0.310 0.300 0.298 0.290 0.282 0.528 0.520 0.512 0.305 0.300 0.295 0.125 0.110 0.095 0.310 0.300 0.290 0.105 0.095 0.085 0.020 0.018 0.016 0.105 0.100 0.095 0.045 0.035 0.025 0.011 0.010 0.009 0.011 0.010 0.009 index mark seating plane 0.175 nom figure 20. 8-lead side-brazed cera mic dual in-line package [sbdip] (d-8-1) dimensions shown in inches ordering guide model 1 , 2 number of axes specified voltage (v) temperat ure range package description package option ADXL206HDZ 2 5 ?40c to +175c 8-lead sbdip d-8-1 1 lead finish. gold over nickel over tungsten. 2 z = rohs compliant part. ?2011 analog devices, inc. all rights reserved. trademarks and registered trademarks are the prop erty of their respective owners. d09600-0-4/11(0)


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